Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Many micro electromechanical systems (MEMS) require a vacuum or controlled atmosphere encapsulation in order to ensure either a good performance or an acceptable lifetime of operation. Two approaches for wafer-scale zero-level packaging exist. The most popular approach is based on wafer bonding. Alternatively, encapsulation can be done by the fabrication and sealing of perforated surface micromachined membranes. In this paper, a sealing method is proposed for zero-level packaging using a thin film reflow technique. This sealing method can be done at arbitrary ambient and pressure. Also, it is self-aligned and it can be used for sealing openings directly above the MEMS device. It thus allows for a smaller die area for the sealing ring reducing in this way the device dimensions and costs. The sealing method has been demonstrated with reflowed aluminium, germanium, and boron phosphorous silica glass. This allows for conducting as well as non-conducting sealing layers and for a variety of allowable thermal budgets. The proposed technique is therefore very versatile

Work functions of self-assembled monolayers on metal surfaces

Using first-principles calculations we show that the work function of noble metals can be decreased or increased by up to 2 eV upon the adsorption of self-assembled monolayers of organic molecules. We identify the contributions to these changes for several (fluorinated) thiolate molecules adsorbed on Ag(111), Au(111) and Pt(111) surfaces. The work function of the clean metal surfaces increases in this order, but adsorption of the monolayers reverses the order completely. Bonds between the thiolate molecules and the metal surfaces generate an interface dipole, whose size is a function of the metal, but it is relatively independent of the molecules. The molecular and bond dipoles can then be added to determine the overall work function.Comment: 5 pages, 2 figure

Post-spinel transformations and equation of state in ZnGa2O4: Determination at high-pressure by in situ x-ray diffraction

Room temperature angle-dispersive x-ray diffraction measurements on spinel ZnGa2O4 up to 56 GPa show evidence of two structural phase transformations. At 31.2 GPa, ZnGa2O4 undergoes a transition from the cubic spinel structure to a tetragonal spinel structure similar to that of ZnMn2O4. At 55 GPa, a second transition to the orthorhombic marokite structure (CaMn2O4-type) takes place. The equation of state of cubic spinel ZnGa2O4 is determined: V0 = 580.1(9) A3, B0 = 233(8) GPa, B0'= 8.3(4), and B0''= -0.1145 GPa-1 (implied value); showing that ZnGa2O4 is one of the less compressible spinels studied to date. For the tetragonal structure an equation of state is also determined: V0 = 257.8(9) A3, B0 = 257(11) GPa, B0'= 7.5(6), and B0''= -0.0764 GPa-1 (implied value). The reported structural sequence coincides with that found in NiMn2O4 and MgMn2O4.Comment: 20 pages, 4 figures, 2 Table

How to Display Group Information on Node-Link Diagrams: An Evaluation

We present the results of evaluating four techniques for displaying group or cluster information overlaid on node-link diagrams: node coloring, GMap, BubbleSets, and LineSets. The contributions of the paper are three fold. First, we present quantitative results and statistical analyses of data from an online study in which approximately 800 subjects performed 10 types of group and network tasks in the four evaluated visualizations. Specifically, we show that BubbleSets is the best alternative for tasks involving group membership assessment; that visually encoding group information over basic node-link diagrams incurs an accuracy penalty of about 25 percent in solving network tasks; and that GMap's use of prominent group labels improves memorability. We also show that GMap's visual metaphor can be slightly altered to outperform BubbleSets in group membership assessment. Second, we discuss visual characteristics that can explain the observed quantitative differences in the four visualizations and suggest design recommendations. This discussion is supported by a small scale eye-tracking study and previous results from the visualization literature. Third, we present an easily extensible user study methodology

Anatomic variation of alveolar antral artery

The alveolar antral artery (AAA) was unanimously encountered in a few available studies with an intraosseous course to anastomose with the infraorbital artery. We report here two cases in which dissection revealed an extraosseous placement of this artery, between the lateral wall of the maxillary sinus and the Schneiderian membrane. The frequency of occurrence of the intraosseous anastomosis should be so modified from 100% to < 100%. This arterial course over the Schneiderian membrane is important during surgical procedures: if it is identified preoperatively it can be avoided, or ligaturated, if not, it may be accidentally severed and uncomfortable haemorrhage may disturb the surgical procedure. In the first case reported here hybrid morphology of the AAA was also found, demonstrating that arterial anatomy should be considered with caution, on a case-by-case basis

Electron transport properties of some new 4-tert-butylcalix[4]arene derivatives in thin films

Temperature dependences of electric conductivity and thermoelectric power of some recently synthesized organic compounds, 4-tert-butylcalix[4]arene derivatives, are studied. Thin-film samples (d = 0.10-0.40 mu m) spin-coated from chloroform solutions onto glass substrates were used. Organic films with reproducible electron transport properties can be obtained if, after deposition, they are submitted to a heat treatment within temperature range of 295-575 K.  The studied polycrystalline compounds show typical p-type semiconductor behavior. The activation energy of the electric conduction ranges between 0.82 and 1.12 eV, while the ratio of charge carrier mobilities was found in the range of 0.83-0.94. Some correlations between semiconducting parameters and molecular structure of the organic compounds have been discussed. In the higher temperature ranges (T>420 K), the electron transport in examined compounds can be interpreted in terms of the band gap representation model, while in the lower temperature range, the Mott\u27s variable-range hopping conduction model was found to be appropriate. The investigated compounds hold promise for thermistor applications.

Thermal stability of poly(3,4-ethylenedioxythiophene)–polystyrenesulfonic acid films electrical properties

Present research on organic solar cells and organic light emitting diodes is based on devices using frequently films of poly(3,4-ethylenedioxythiophene)–polystyrenesulfonic acid (PEDOT–PSS). In this paper we present the results of thermal treatments in the open atmosphere on morphological, optical and electrical properties of PEDOT-PSS films. Studies on electrical conductivity and transport mechanisms were carried out on thin films in the temperature range 300–400 K in the dark and under illumination

Endothelial progenitor cells populate the stromal stem niche of tympanum

The tympanic membrane (TM) integrity is of utmost importance for the sense of hearing. Therefore, the intrinsic potential of the TM to regenerate and repair deserves complete characterisation. Existing studies brought evidence on the epithelial stem niche of the TM. However, the stromal compartment was not evaluated for harbouring a distinctive stem, or progenitor, niche. We aimed doing this in transmission electron microscopy. We used TMs dissected out from 3 male Oryctolagus cuniculus rabbits. Evidence of stromal quiescent stem cells was gathered. Moreover, endothelial progenitor cells were found in the TM, being accurately identified by two specific ultrastructural markers of the endothelial lineage: the Weibel-Palade bodies and the stomatal diaphragms of the subplasmalemmal caveolae. The stromal stem niche of the TM appears to be a distinctive contributor during physiological and pathological processes of the TM, such as cholesteatoma formation, at least as a biological support for processes of vasculogenesis. However, further characterisation of the molecular pattern of the stromal stem niche of the TM is mandatory